Browsing by Author HEISSMEER M.

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Publication YearJRC N°TitleAuthor(s), Editor(s), Other Contributor(s)Publication Type
1996JRC13078Calibration of a Microlithographic Fabrication Process Using Non-Destructive Testing and Rigorous Electromagnetic TheoryHEISSMEER M.; SHERIDAN John; SCHWIDER J.Articles in periodicals and books