Browsing by Author THOMAS Laurent

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Publication YearJRC Publication N°TitleAuthor(s), Editor(s), Other Contributor(s)Publication Type
1998JRC16029c-BN Formation by RF Capacitively Coupled PECVD from BCl3.SCHAFFNIT Catherine; THOMAS Laurent; ROSSI FrancoisContributions to Conferences
1997JRC17666Etching of Boron Nitride in R.F. Plasmas.SCHAFFNIT Catherine; THOMAS Laurent; ROSSI FrancoisArticles in Journals
1996JRC12837Plasma Assisted Chemical Vapour Desposition of BN Coatings. Effect of the Experimental Parameters on the Structure of the FilmsSCHAFFNIT Catherine; THOMAS Laurent; ROSSI Francois; HUGON RobertContributions to Conferences