JRC Publications Repository

JRC Publications Repository > Joint Research Centre > Institute for Health and Consumer Protection >

Please use this identifier to cite or link to this item: http://publications.jrc.ec.europa.eu/repository/handle/111111111/1242

Title: W and WC Layers Deposition by Shielded Inductively Coupled Plasma Source.
Authors: COLPO P.
MEZIANI Tarik
SAUVAGEOT Philippe
CECCONE Giacomo
GIBSON Peter neil
ROSSI Francois
MONGE CADET P.
Citation: J. Vac. Sci. Technol. vol. A20 no. 5 p. 1632-1638
Publication Year: 2002
JRC Publication N°: JRC22783
URI: http://publications.jrc.ec.europa.eu/repository/handle/111111111/1242
Type: Articles in Journals
Appears in Collections:Institute for Health and Consumer Protection

Files in This Item:

There are no files associated with this item.

Items in repository are protected by copyright, with all rights reserved, unless otherwise indicated.

 

The mission of the JRC is to provide customer-driven scientific and technical support for the conception, development, implementation and monitoring of EU policies. As a service of the European Commission, the JRC functions as a reference centre of science and technology for the Union. Close to the policy-making process, it serves the common interest of the Member States, while being independent of special interests, whether private or national.
Powered by DSpace
Top