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Please use this identifier to cite or link to this item: http://publications.jrc.ec.europa.eu/repository/handle/111111111/5258

Title: Inductively Coupled Plasmas: Optimizing the Inductive-Coupling Efficiency for Large-Area Source Design
Authors: COLPO Pascal
MEZIANI Tarik
ROSSI FRANCOIS
Citation: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS vol. 23 no. 2 p. 270-277
Publisher: AMERICAN VACUUM SOCIETY
Publication Year: 2005
JRC Publication N°: JRC32085
URI: http://publications.jrc.ec.europa.eu/repository/handle/111111111/5258
Type: Articles in Journals
Appears in Collections:Institute for Health and Consumer Protection

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