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Please use this identifier to cite or link to this item: http://publications.jrc.ec.europa.eu/repository/handle/111111111/5662

Title: Dry Etching of ITO by Magnetic Pole Enhanced Inductively Coupled Plasma for Display and Biosensing Devices
Authors: MEZIANI Tarik
COLPO Pascal
LAMBERTINI V.
CECCONE GIACOMO
ROSSI FRANCOIS
Citation: APPLIED SURFACE SCIENCE no. 252 p. 3861-3870
Publisher: Elsevier B.V.
Publication Year: 2006
JRC Publication N°: JRC32113
URI: http://publications.jrc.ec.europa.eu/repository/handle/111111111/5662
Type: Articles in Journals
Appears in Collections:Institute for Health and Consumer Protection

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