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Please use this identifier to cite or link to this item: http://publications.jrc.ec.europa.eu/repository/handle/111111111/5726

Title: Electrical Modelling of RF Coupled Inductors Supplying a Double Frequency Inductive Plasma Reactor.
Authors: COLPO P.
ERNST Roland
KERADEC Jean-pierre
Citation: Plasma Sources Sci. Technol. vol. 8 p. 587-593
Publication Year: 1999
JRC Publication N°: JRC18932
URI: http://publications.jrc.ec.europa.eu/repository/handle/111111111/5726
Type: Articles in Journals
Appears in Collections:Institute for Health and Consumer Protection

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