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Please use this identifier to cite or link to this item: http://publications.jrc.ec.europa.eu/repository/handle/111111111/8729

Title: Ion Beam Sputtering of Ta2O5 Films on Thermoplast Substrates as Waveguides for Biosensors
Authors: KULISCH Wilhelm
GILLILAND Douglas
CECCONE Giacomo
SIRGHI Lucel
RAUSCHER Hubert
GIBSON Peter
ZURN Martin
BRETAGNOL Frederic
ROSSI Francois
Citation: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B vol. 27 no. 3 p. 1180-1190
Publisher: A V S AMER INST PHYSICS
Publication Year: 2009
JRC Publication N°: JRC55048
ISSN: 1071-1023
URI: http://publications.jrc.ec.europa.eu/repository/handle/111111111/8729
DOI: 10.1116/1.3137965
Type: Articles in Journals
Appears in Collections:Institute for Health and Consumer Protection

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