Title: Modelling of Equivalent Circuit of Inductively Coupled Plasma Sources.
Authors: COLPO P.ERNST RolandROSSI Francois
Citation: Journal of Vacuum Science and Technologies
Publication Year: 1999
JRC N°: JRC16195
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC16195
Type: Articles in periodicals and books
Abstract: Abstract not available
JRC Directorate:Joint Research Centre Historical Collection

Files in This Item:
There are no files associated with this item.

Items in repository are protected by copyright, with all rights reserved, unless otherwise indicated.