Title: Modelling of Equivalent Circuit of Inductively Coupled Plasma Sources.
Authors: COLPO P.ERNST RolandROSSI Francois
Citation: Journal of Vacuum Science and Technologies
Publication Year: 1999
JRC N°: JRC16195
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC16195
Type: Contributions to Conferences
Abstract: Abstract not available
JRC Institute:Joint Research Centre Historical Collection

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