Title: Determination of the Equivalent Circuit of Inductively Coupled Plasma Sources.
Authors: COLPO P.ERNST RolandROSSI Francois
Citation: Journal of Applied Physics vol. 85 no. 3 p. 1365-1371
Publication Year: 1999
JRC Publication N°: JRC17678
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC17678
Type: Articles in Journals
Abstract: Abstract not available
JRC Institute:Institute for Health and Consumer Protection

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