Title: Mechanical Properties, Stress Evolution and High Temperature Thermal Stability of Nanolayered Mo.Si-N/SiC Thin Films.
Authors: TORRI P.HIRVONEN Juha-pekkaKUNG H.LU Y.c.NASTASI M.GIBSON Peter neil
Citation: Journal of Vacuum Science and Technology B vol. 17 no. 4 p. 1329-1335
Publication Year: 1999
JRC N°: JRC17788
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC17788
Type: Articles in Journals
Abstract: Abstract not available
JRC Institute:Joint Research Centre Historical Collection

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