Title: Electrical Modelling of RF Coupled Inductors Supplying a Double Frequency Inductive Plasma Reactor.
Authors: COLPO P.ERNST RolandKERADEC Jean-pierre
Citation: Plasma Sources Sci. Technol. vol. 8 p. 587-593
Publication Year: 1999
JRC Publication N°: JRC18932
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC18932
Type: Articles in Journals
Abstract: Abstract not available
JRC Institute:Institute for Health and Consumer Protection

Files in This Item:
There are no files associated with this item.


Items in repository are protected by copyright, with all rights reserved, unless otherwise indicated.