Title: Structural and Dimensional Control in Micromachined Integrated Solid State Gas Sensors.
Authors: RICKERBY David georgeWAECHTER NorbertHORRILLO M.c.GUTIERREZ J.GRACIA I.CANE' C.
Citation: Sensors and Actuators B vol. 69 p. 314-319
Publication Year: 2000
JRC Publication N°: JRC20151
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC20151
Type: Articles in Journals
Abstract: Abstract not available
JRC Institute:Institute for Health and Consumer Protection

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