Title: Antimony Implanted in Silicon. A Thin Layer Reference Material for Surface Analysis.
Authors: ECKER K.h.BERGER A.GROETZSCHEL RainerPERSSON LeifWAETJEN Uwe
Citation: Nucl. Instr. & Meth. in Phys. Res. B
Publication Year: 2000
JRC N°: JRC20975
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC20975
Type: Contributions to Conferences
Abstract: Abstract not available
JRC Institute:Institute for Reference Materials and Measurements

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