Title: Design of a Magnetic-Pole Enhanced Inductively Coupled Plasma Source.
Authors: MEZIANI TarikCOLPO P.ROSSI Francois
Citation: Plasma Sources Science and Technology vol. 10 p. 276-283
Publication Year: 2001
JRC N°: JRC21328
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC21328
Type: Articles in Journals
Abstract: Abstract not available
JRC Institute:Institute for Health and Consumer Protection

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