Title: Contribution of ICP-IDMS to the Certification of Antimony Implanted in a Silicon Wafer - Comparison with RBS and INAA Results.
Authors: PRITZKOW W.VOGL JochenBERGER A.ECKER K.h.GROETZSCHEL RainerKLINGBEIL B.PERSSON LeifRIEBE G.WAETJEN Uwe
Citation: Fresenius' J. Anal. Chem. vol. 371 p. 867-873
Publication Year: 2001
JRC Publication N°: JRC22683
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC22683
Type: Articles in Journals
Abstract: Abstract not available
JRC Institute:Institute for Reference Materials and Measurements

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