Title: W and WC Layers Deposition by Shielded Inductively Coupled Plasma Source.
Authors: COLPO P.MEZIANI TarikSAUVAGEOT PhilippeCECCONE GiacomoGIBSON Peter neilROSSI FrancoisMONGE CADET P.
Citation: J. Vac. Sci. Technol. vol. A20 no. 5 p. 1632-1638
Publication Year: 2002
JRC N°: JRC22783
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC22783
Type: Articles in Journals
Abstract: Abstract not available
JRC Institute:Institute for Health and Consumer Protection

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