Title: Comparison of Dynamic Simulations with RBS Measurements of Low Energy Ion Implantation of Sb+ into Si02/Si Substrates
Authors: IGNATOVA V.WAETJEN UWEKATARDJIEV I.v.CHAKAROV I.r.
Citation: MIKROCHIMICA ACTA vol. Vol. 145 p. 67-74
Publisher: SPRINGER
Publication Year: 2005
JRC N°: JRC30109
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC30109
Type: Articles in Journals
Abstract: See attached
JRC Institute:Institute for Reference Materials and Measurements

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