Title: Full-field Heterodyne Interferometry Using a Complementary Metal-oxide Semiconductor Digital Signal Processor Camera for High-resolution Profilometry
Authors: AGUANNO Mauro V.LAKESTANI FEREYDOUNWHELAN MAURICECONNELLY Michael J.
Citation: OPTICAL ENGINEERING vol. 46 no. 9 p. 095601
Publisher: SPIE-INT SOCIETY OPTICAL ENGINEERING
Publication Year: 2007
JRC Publication N°: JRC42029
ISSN: 0091-3286
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC42029
DOI: 10.1117/1.2779346
Type: Articles in Journals
Abstract: We describe a heterodyne interferometry system based on a complementary metal-oxide semiconductor digital signal processor -CMOS-DSP- camera that is utilized for full-field optical phase measurement using a carrier-based phase retrieval algorithm, with no need for electro-mechanical scanning. Camera characterization test results support the adoption of a single-pixel approach to perform quasiinstantaneous differential phase measurements, which are immune to mechanical vibrations and thermal drifts. We developed an optical configuration based on a Mach-Zehnder heterodyne interferometer to perform a static test on a mirror surface. The profiles of the mirror surface set at two angular positions, the relative displacements in the range of nanometers, and the corresponding tilt angle were determined.
JRC Institute:Institute for Health and Consumer Protection

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