Title: Structure and mechanical properties of low temperature magnetron sputtered nanocrystalline (nc-)Ti(N,C)/amorphous diamond like carbon (a-DLC) coatings
Authors: TSOTOS C.BAKER M.a.POLYCHRONOPOULOU K.GIBSON PeterGIANNAKOPOULOS K.POLYCARPOU A.BOBEL K.REBHOLZ C.
Citation: THIN SOLID FILMS vol. 519 no. 1 p. 24-30
Publisher: ELSEVIER SCIENCE SA
Publication Year: 2010
JRC Publication N°: JRC52037
ISSN: 0040-6090
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC52037
DOI: 10.1016/j.tsf.2010.07.049
Type: Articles in Journals
Abstract: This paper reports on the structure and mechanical properties of ~ 2 µm thick nanocrystalline (nc-) Ti(N,C)/ amorphous (a-) diamond like carbon (DLC) coatings deposited on 100Cr6 steel substrates, using low temperature (~ 200 oC) DC reactive magnetron sputtering. The carbon content was varied with acetylene partial pressure in order to obtain single layer coatings with different a-DLC carbon phase fractions. The nanocrystalline Ti(N,C) phase is approximately stoichiometric for all coatings and the DLC phase fraction increases from 31 ¿ 47 at. % as the coatings stoichiometry changed from TiC1.34N0.51 to TiC2.48N0.48, respectively. TiC1.34N0.51 coatings showed the highest nano-indentation hardness (H) of ~14 GPa and a modulus (Er) of ~144 GPa; H reduced to < 6 GPa and Er to < 70 GPa for TiC2.48N0.48 coatings. Nc-Ti(N,C)/a-DLC coatings are promising candidates for applications where better matching of the modulus between relatively low modulus substrate, hard loading support layer and low modulus-high H/E ratio top layer is required.
JRC Institute:Institute for Health and Consumer Protection

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