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|Title:||Structure and mechanical properties of low temperature magnetron sputtered nanocrystalline (nc-)Ti(N,C)/amorphous diamond like carbon (a-DLC) coatings|
|Authors:||TSOTOS C.; BAKER M.a.; POLYCHRONOPOULOU K.; GIBSON Peter; GIANNAKOPOULOS K.; POLYCARPOU A.; BOBEL K.; REBHOLZ C.|
|Citation:||THIN SOLID FILMS vol. 519 no. 1 p. 24-30|
|Publisher:||ELSEVIER SCIENCE SA|
|JRC Publication N°:||JRC52037|
|Type:||Articles in Journals|
|Abstract:||This paper reports on the structure and mechanical properties of ~ 2 µm thick nanocrystalline (nc-) Ti(N,C)/ amorphous (a-) diamond like carbon (DLC) coatings deposited on 100Cr6 steel substrates, using low temperature (~ 200 oC) DC reactive magnetron sputtering. The carbon content was varied with acetylene partial pressure in order to obtain single layer coatings with different a-DLC carbon phase fractions. The nanocrystalline Ti(N,C) phase is approximately stoichiometric for all coatings and the DLC phase fraction increases from 31 ¿ 47 at. % as the coatings stoichiometry changed from TiC1.34N0.51 to TiC2.48N0.48, respectively. TiC1.34N0.51 coatings showed the highest nano-indentation hardness (H) of ~14 GPa and a modulus (Er) of ~144 GPa; H reduced to < 6 GPa and Er to < 70 GPa for TiC2.48N0.48 coatings. Nc-Ti(N,C)/a-DLC coatings are promising candidates for applications where better matching of the modulus between relatively low modulus substrate, hard loading support layer and low modulus-high H/E ratio top layer is required.|
|JRC Institute:||Institute for Health and Consumer Protection|
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