Title: Comparative Study of TiNx Films Deposited by Reactive Ion Beam Sputtering at 77 and 300 K
Authors: MANARA AdrianoGISSLER WolframHAUPT JustusBUSCHERT R.c.GIBSON PeterJIANG X.REICHELT K.
Citation: Surface and Interface Analysis vol. 16 p. 510-514
Publication Year: 1990
JRC Publication N°: JRC6652
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC6652
Type: Contributions to Conferences
Abstract: Abstract not available
JRC Institute:Joint Research Centre Historical Collection

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