Title: Structural Investigation of Reactive Sputtered Boron Nitride Films
Authors: GISSLER WolframHAUPT JustusGIBSON Peter neil
Citation: Thin Solid Films vol. 209 p. 155-160
Publication Year: 1992
JRC N°: JRC8591
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC8591
Type: Articles in Journals
Abstract: Abstract not available
JRC Institute:Joint Research Centre Historical Collection

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