@article{JRC16027, address = {}, year = {1998}, author = {Colpo P and Rossi F}, abstract = {Abstract not available }, title = {Deposition of Tungsten Thin Films by Dual Frequency Inductively Coupled Plasma Assisted CVD.}, type = {}, url = {}, volume = {}, number = {}, journal = {Not available}, pages = {}, issn = {}, publisher = {}, doi = {} }