@article{JRC16195,
	address = {},
	year = {1999},
	author = {Colpo P and Ernst R and Rossi F},
	abstract = {Abstract not available
		},
	title = {Modelling of Equivalent Circuit of Inductively Coupled Plasma Sources.},
	type = {},
	url = {},
	volume = {},
	number = {},
	journal = {Journal of Vacuum Science and Technologies},
	pages = {},
	issn = {},
	publisher = {},
	doi = {}
}