@article{JRC19051,
	address = {},
	year = {1999},
	author = {Pejnefors J and Zhang S and Grahn J and Ostling M and Persson L and Hult M},
	abstract = {Abstract not available
		},
	title = {Hydrogen in Undoped and Heavily in situ Phosphorus Doped Silicon Films Deposited Using Disilane and Phosphine.},
	type = {},
	url = {},
	volume = {86},
	number = {},
	journal = {Journal of Applied Physics},
	pages = {1970-1973},
	issn = {},
	publisher = {},
	doi = {}
}