@article{JRC22685,
	address = {},
	year = {2002},
	author = {Boudreault G and Jeynes C and Wendler E and Nejim A and Webb RP and Waetjen U},
	abstract = {Abstract not available
		},
	title = {Accurate RBS Measurement of Ion Implant Doses in Silicon},
	type = {},
	url = {},
	volume = {33},
	number = {},
	journal = {Surface and Interface Analysis},
	pages = {478-486},
	issn = {},
	publisher = {John Wiley and Sons},
	doi = {}
}