@article{JRC29282,
	address = {},
	year = {2004},
	author = {Ignatova VA and Watjen U and Katardjiev I and Chakarov I},
	abstract = {Abstract not available
		},
	title = {Comparison of Dynamic Simulations with RBS Measurements of Low Energy Ion Implantation of Sb into Si02/Si Substrates.},
	type = {},
	url = {},
	volume = {145},
	number = {},
	journal = {Microchimica Acta},
	pages = {67-74},
	issn = {},
	publisher = {},
	doi = {}
}