Frequency Tuning Investigation of an Out-of-Plane Resonant Microstructure for a Capacitive Detection Magnetometer
In this chapter, we are studying resonant magnetic field sensors which rely on capacitive detection principles for sensing. More specifically, we analyse the sensing behaviour and the performance of a Lorentz force based magnetic field sensor, which has been designed and fabricated at the Université Catholique de Louvain (UCL), Belgium based on the SOIMUPS process. This device differs from existing designs already reported in the literature because it makes use of interdigitated finger type electrodes for sensing. The device is modelled and analysed focusing on both the mechanical and the electrical response during operation. Moreover, we study potential problems that can affect the operation of the sensor and lead to erroneous readings and propose possible solutions.
GKOTSIS Petros;
SAID Mohamed;
TOUNSI Fares;
MEZGHANI Brahim;
FRANCIS Laurent;
2017-11-09
CRC Press Taylor and Francis Group
JRC106161
9781498710978,
https://www.crcpress.com/Magnetic-Sensors-and-Devices-Technologies-and-Applications/Francis-Poletkin-Iniewski/p/book/9781498710978,
https://publications.jrc.ec.europa.eu/repository/handle/JRC106161,
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