Title: A Combined X-Ray Photoelectron/Auger Electron Spectroscopy/glancing Angle X-Ray Diffractiion/Extended X-ray Absorption Fine Structure Investigation of TiBxNy Coatings.
Authors: MOLLART Timothy peterGIBSON Peter neilGISSLER Wolfram
Citation: Journal of Vacuum Science and Technology A vol. A15 p. 284-291
Publication Year: 1997
JRC N°: JRC13272
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC13272
Type: Articles in periodicals and books
Abstract: Ti-B-N coatings with a three phase TiB2+TiN+BN composition have been deposited by reactive magnetron sputtering. XPS/AES/GAXRD and EXAFS have been employed to characterise the films and understand the relation between chemical composition and microstructure. The Ti based phases are dominated by the presence of nanocrystalline TiB2, the grain size of which decreases to an unmeasurably low value with increasing N content. Evidence of TiB2, TiN and BN bonding is found in the XPS spectra and the phase composition has been found to be in good agreement with that predicted by the phase diagram. The BN phase present is shown by XPS and AES to be h-BN.
JRC Directorate:Joint Research Centre Historical Collection

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