Title: Plasma Assisted Chemical Vapour Deposition of Boron Nitride Using BCl3-N2-H2-Ar Gas Mixture.
Authors: ROSSI FrancoisSCHAFFNIT CatherineDEL PUPPO H.HUGON Robert
Citation: Vacuum vol. 51 p. 169-181
Publication Year: 1997
JRC N°: JRC15486
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC15486
Type: Articles in periodicals and books
Abstract: Abstract not available
JRC Directorate:Joint Research Centre Historical Collection

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