Title: c-BN Formation by RF Capacitively Coupled PECVD from BCl3.
Authors: SCHAFFNIT CatherineTHOMAS LaurentROSSI Francois
Citation: Not available
Publication Year: 1998
JRC N°: JRC16029
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC16029
Type: Articles in periodicals and books
Abstract: Abstract not available
JRC Directorate:Joint Research Centre Historical Collection

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