Estimation of the 2D Measurement Error Introduced by In-Plane and Out-of-Plane Electronic Speckle Pattern Interferometry Instruments.

Optical interferometic metrology techniques are being increasingly used in industry.These techniques assure a greater accuracy in measuring displacements caused by deformations. One such technique, Electronic Speckle Pattern Interferometry (ESPI), has been used successfully to measure out-of-plane deformations. This study has lead to an improved 3D geometric model, allowing us to assess qualitatively and quantitatively what is actually measured throughout all the inspected surface. Calculations with practical parameters taken from a real ESPI instrument designed in the Joint Research Centre of Ispra (Italy) were carried out. The results showing three-dimensional diagrams of the error measurements are presented and discussed.

ALBRECHT Daniel Jacques; 

1998-06-05

JRC16343

https://publications.jrc.ec.europa.eu/repository/handle/JRC16343,