Random Depth Access Full-Field Heterodyne Low Coherence Interferometry Utilizing Acousto-Optic Modulation and a Complementary Metal-Oxide Semiconductor Camera
With analog scanning, time domain low coherence interferometry lacks precise depth information, and optical carrier generation demands a linear scanning speed. Utilizing a
logarithmic CMOS-DSP camera, acousto-optic modulation, and digital depth stepping, full-field heterodyne low coherence interferometry (FFH-LCI) is reported, where random regions of interest, lateral and axial, can be accessed. Furthermore, nanometer profilometry is possible through heterodyne phase retrieval of the interference signal. The approach demonstrates inexpensive yet high precision, functional machine vision offering true digital random access in three-dimensions.
EGAN Patrick;
CONNELLY Michael J.;
LAKESTANI Fereydoun;
WHELAN Maurice;
2006-05-18
OPTICAL SOC AMER
JRC32297
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