Fabrication of Functional Nano-Patterned Surfaces by a Combination of Plasma Processes and Electron-Beam Lithography
This work presents a method for the fabrication of well defined chemically
active nano-patterned surfaces. Electron-beam lithography has been
combined with plasma-based processes in order to create sub-micron
carboxylic functional areas over a non-bio-adhesive matrix. Characterization
of the patterned surface by several surface analysis techniques reveals that
this patterning technique is compatible with the plasma polymerization
process in order to fabricate chemically active features with lateral size down
to 300 nm. Moreover, experiments with a model protein (bovine serum
albumin) on the patterned surfaces show preferential adhesion on the active
region indicating the ability of this method for the design of biosensing
platforms.
BRETAGNOL Frederic;
CERIOTTI Laura;
VALSESIA Andrea;
SASAKI Takao;
CECCONE Giacomo;
GILLILAND Douglas;
COLPO Pascal;
ROSSI Francois;
2007-06-29
IOP PUBLISHING LTD
JRC37597
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