Full-field Heterodyne Interferometry Using a Complementary Metal-oxide Semiconductor Digital Signal Processor Camera for High-resolution Profilometry

We describe a heterodyne interferometry system based on a complementary metal-oxide semiconductor digital signal processor -CMOS-DSP- camera that is utilized for full-field optical phase measurement using a carrier-based phase retrieval algorithm, with no need for electro-mechanical scanning. Camera characterization test results support the adoption of a single-pixel approach to perform quasiinstantaneous differential phase measurements, which are immune to mechanical vibrations and thermal drifts. We developed an optical configuration based on a Mach-Zehnder heterodyne interferometer to perform a static test on a mirror surface. The profiles of the mirror surface set at two angular positions, the relative displacements in the range of nanometers, and the corresponding tilt angle were determined.

AGUANNO Mauro V.;  LAKESTANI Fereydoun;  WHELAN Maurice;  CONNELLY Michael J.; 

2008-01-10

SPIE-INT SOCIETY OPTICAL ENGINEERING

JRC42029

0091-3286,   

https://publications.jrc.ec.europa.eu/repository/handle/JRC42029,   

10.1117/1.2779346,