Title: A Study of the Nanostructure and Hardness of Electron Beam Evaporated TiAlBN Coatings
Citation: THIN SOLID FILMS vol. 518 no. 15 p. 4273-4280
Publication Year: 2010
JRC N°: JRC52307
ISSN: 0040-6090
URI: http://publications.jrc.ec.europa.eu/repository/handle/JRC52307
DOI: 10.1016/j.tsf.2009.12.109
Type: Articles in periodicals and books
Abstract: TiAlBN coatings have been deposited by electron beam (EB) evaporation from a single TiAlBN material source onto AISI 316 stainless steel substrates at a temperature of 450¿C and substrate bias of -100 V. The stoichiometry and nanostructure have been studied by x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD) and transmission electron microscopy (TEM). The hardness and elastic modulus were determined by nanoindentation. Five coatings have been deposited, three from hot-pressed TiAlBN material and two from hot-isostatically pressed (HIPped) material. The coatings deposited from the hot pressed material exhibited a nanocomposite nc-(Ti,Al)N/a-BN/a-(Ti,Al)B2 structure, the relative phase fraction being consistent with that predicted by the equilibrium Ti-B-N phase diagram. Nanoindentation hardness values were in the range of 22 to 32 GPa. Using the hot-isostatically pressed (HIPped) material, coating (Ti,Al)B0.29N0.46 was found to have a phase composition of 72-79 mol.% nc-(Ti,Al)(N,B)1-x + 21-28 mol.% amorphous titanium boride and a hardness of 32 GPa. The second coating, (Ti,Al)B0.66N0.25, was x-ray amorphous with a nitride + boride multiphase composition and a hardness of 26 GPa. The nanostructure and structure-property relationships of all coatings are discussed in detail. Comparisons are made between the single-EB coatings deposited in this work and previously deposited twin-EB coatings. Twin-EB deposition gives rise to lower adatom mobilites, leading to (111) (Ti,Al)N preferential orientation, smaller grain sizes, less dense coatings and lower hardnesses.
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