Aberration-free lithography setup for fabrication of holographic diffractive optical elements.
A holographic optical lithography setup with extremely small longitudinal spherical aberration is described. The setup is used for the fabrication of holographic diffractive optical elements intended to collect light emitted from a fluorescence spot located on a
biochip surface. The crucial feature of the optical setup is its ability to simulate a point-source-like fluorescence spot. Detailed description of the setup together with its optical properties is given. The holographic diffractive optical elements formed by this setup achieved 8-fold enhancement in fluorescence light collection.
MACKO Peter;
WHELAN Maurice;
2010-01-13
OPTICAL SOC AMER
JRC53338
0146-9592,
http://www.opticsinfobase.org/ol/abstract.cfm?uri=ol-34-19-3006,
https://publications.jrc.ec.europa.eu/repository/handle/JRC53338,
10.1364/OL.34.003006,
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