Facilities for Testing Hydrogenated Amorphous Silicon Films in the JRC-Ispra

IN THIS REPORT A DETAILED DESCRIPTION OF SEVERAL METHODS WHICH HAVE BEEN APPLIED FOR THE CHARACTERIZATION OF AMORPHOUS HYDROGENATED SILICON IS GIVEN. THESE METHODS ARE: OPTICAL AND INFRARED SPECTROSCOPY, ELECTRON SPIN RESONANCE, DARK AND PHOTO CONDUCTIVITY MEASUREMENTS, AND STATIONARY AND TRANSIENT IMPEDANCE SPECTROSCOPY. IN THE FIRST PART THE INFORMATION AND PARAMETERS, WHICH CAN BE OBTAINED BY THE APPLICATION OF THE DESCRIBED METHODS ARE REVIEWED. IN THE SECOND PART, THE MEASUREMENT TECHNIQUE OF EACH METHOD AND ITS IMPLEMENTATION IN A TEST LABORATORY OF THE JRC IS DESCRIBED. COMPUTER PROGRAM ROUTINES HAVE BEEN DEVELOPED TO CONTROL AND EVALUATE MEASUREMENTS. THEY ARE AVAILABLE ON REQUEST.

GISSLER Wolfram;  HAUPT Justus; 

1995-03-15

European Commission

JRC5807

EUR 11623 EN,   

https://publications.jrc.ec.europa.eu/repository/handle/JRC5807,